SPM探针制造技术的研究和发展

探针是扫描探针显微镜的核心部分，结构及针尖的表面状态会影响此类仪器的操作性、可控制性、工作稳定性、可靠性以及其它性能的发挥。探针及其相关技术的研究进展成为人们十分关注的问题。探针对表面物理信息的检测是一个针尖与试样表面相互作用的过程，包含物理、几何关系，还包含表面微观化学作用及其它微观因素的影响。本文探讨探针与表面相互作用关系，并就近些年探针技术发展讨论探针性能、针尖及相应结构的改进，探针功能的拓展以及功能的组合，讨论相关制备技术方法、特点和相应检测条件、适用环境等。

Evolvement of fabrication technology of SPM probe

Probe is a key element in a scanning probe microscopy system,the shape and structure of probe as well as it's tip,including the performance and the tip surfaces status,decide the capability of an instrument,and give much influence on the stability and reliability of the system.So the fabrication of SPM probe becomes the focus of attention.In this paper,interaction between the tip and surface of the sample,including physical,geometrical,chemical processes,has been discussed.A review is given on the recent development of SPM probe from the points of the improving measurement performance,reformation of probe and tip structures,development of multi-function and so on.The characteristics and application conditions of these methods were discussed.