Microdeposition of metal and oxide structures using ultrashort laser pulses |
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| Authors: | I Zergioti S Mailis NA Vainos P Papakonstantinou C Kalpouzos CP Grigoropoulos C Fotakis |
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| Institution: | (1) Foundation for Research and Technology-Hellas, Institute of Electronic Structure and Laser, FORTH-IESL, P.O. Box 1527, 71110, Hellas (Fax: +30-81/391318, E-mail: vainos@iesl.forth.gr), GR |
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| Abstract: | 2 O3 on glass and silicon substrates is performed. The superior quality of the results allows the direct, one-step fabrication
of binary-amplitude and multilevel optical diffractive structures.
Received: 4 February 1998/Accepted: 9 February 1998 |
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| Keywords: | PACS: 81 15 F 07 10 C 42 40 J |
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