Uncooled microbolometer detector: recent developments at ULIS |
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Authors: | J L Tissot C Trouilleau B Fieque A Crastes O Legras |
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Institution: | (1) ULIS, BP 27, 38113 Veurey-Voroize, France |
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Abstract: | Uncooled infrared focal plane arrays are being developed for a wide range of thermal imaging applications. Fire-fighting,
predictive maintenance, process control and thermography are a few of the industrial applications which could take benefit
from uncooled infrared detector. Therefore, to answer these markets, a 35-μm pixel-pitch uncooled IR detector technology has
been developed enabling high performance 160×120 and 384×288 arrays production. Besides a wide-band version from uncooled
320×240/45 μm array has been also developed in order to address process control and more precisely industrial furnaces control.
The ULIS amorphous silicon technology is well adapted to manufacture low cost detector in mass production. After some brief
microbolometer technological background, we present the characterization of 35 μm pixel-pitch detector as well as the wide-band
320×240 infrared focal plane arrays with a pixel pitch of 45 μm.
The paper presented there appears in Infrared Photoelectronics, edited by Antoni Rogalski, Eustace L. Dereniak, Fiodor F. Sizov, Proc. SPIE Vol. 5957, 59570M (2005). |
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Keywords: | uncooled IRFPA 2D array MWIR LWIR microbolometer amorphous silicon |
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