A Hybrid Experimental/Numerical Investigation of the Response of Multilayered MEMS Devices to Dynamic Loading |
| |
Authors: | J Kimberley J Lambros I Chasiotis J Pulskamp R Polcawich M Dubey |
| |
Institution: | (1) Aerospace Engineering, University of Illinois at Urbana Champaign, Urbana, IL, USA;(2) US Army Research Laboratories, Adelphi, MD, USA; |
| |
Abstract: | In order to probe the mechanical response of microelectromechanical systems (MEMS) subjected to dynamic loading, a modified
split Hopkinson pressure bar was used to load MEMS devices at accelerations ranging from 103–105
g. Multilayer beams consisting of a PZT film sandwiched between two metal electrodes atop an elastic layer of silicon dioxide
were studied because of their relevance to active MEMS devices. Experiments were conducted using the modified split Hopkinson
pressure bar to quantify the effects of dynamic loading amplitude, duration, and temporal profile on the failure of the multilayered
cantilever beams. Companion finite element simulations of these beams, informed by experimental measurements, were conducted
to shed light into the deformation of the multilayered beams. Results of the numerical simulations were then coupled with
independent experimental measurements of failure stress in order to predict the material layer at which failure initiation
occurred, and the associated time to failure. High-speed imaging was also used to capture the first real-time images of MEMS
structures responding to dynamic loading and successfully compare the recorded failure event with those predicted numerically. |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|