| 近柱面中频面形检测中曲面拟合法精度问题研究 |
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| 引用本文： | 谢本超,卢振武,李凤有. 近柱面中频面形检测中曲面拟合法精度问题研究[J]. 物理学报, 2005, 54(7): 3144-3148 |
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| 作者姓名： | 谢本超 卢振武 李凤有 |
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| 作者单位： | (1)中国科学院长春光学精密机械与物理研究所，应用光学国家重点实验室，长春 130 033; (2)中国科学院长春光学精密机械与物理研究所，应用光学国家重点实验室，长春 130 033;中国科学院研究生院，北京 100039 |
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| 摘 要： | 研究了曲面拟合法对特定抛物和双曲近柱面检测中波前像差的处理过程，结果表明，对振幅为01λ的中频正弦型面形，由曲面拟合法得到的结果与该正弦型面形之差的RMS值分别可以达到0015λ（825nm）和0013λ（715nm）.通过分析拟合阶数对精度的影响，确认存在一个特殊的阶数no、它使曲面拟合法的精度达到最高；讨 论了估计no值的方法，得到了和no真实值完全符合的估计值，表明这些方 法是行之有效的.关键词：光学检测近柱面曲面拟合
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| 关 键 词： | 光学检测 近柱面 曲面拟合 |
| 文章编号： | 1000-3290/2005/54(07)3144-05 |
| 收稿时间： | 2004-09-20 |
Investigation of the precision of curved surface fitting in the measurement of near-cylindrical surfaces'''' mid-wavelength deformations |
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| XIE Ben-chao,LU Zhen-wu,LI Feng-you. Investigation of the precision of curved surface fitting in the measurement of near-cylindrical surfaces'''' mid-wavelength deformations[J]. Acta Physica Sinica, 2005, 54(7): 3144-3148 |
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| Authors: | XIE Ben-chao LU Zhen-wu LI Feng-you |
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| Abstract: | The application of curved surface fitting for the disposal of the wavefront aberrations got in the measurement of certain paraboloid and hyperboloid is studied. It is found that,for mid-wavelength deformations with an amplitude of 01λ, results can be obtained with RMS error smaller than 0015λ and 0013λ separately. The existence of a special fitting order which leads to the smallest RMS e rror is affirmed. To find out the special fitting order,we work out two methods which help us get the order's value successfully. |
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| Keywords: | optical testing near-cylindrical surfaces curved surface fitting |
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