Multispectral microbolometers for the midinfrared

The spectral responsivity and the dynamic behavior of microbolometers with an integrated absorbing metamaterial are investigated. Wavelength tailoring and tuning in different microbolometers are achieved by varying the lateral extension of the absorber elements. Maximum sensitivity is tuned between 2.9 and 7.7 μm, with peak absorptions reaching up to 88%. The presence of a continuous metallic shielding layer affects heat conduction and leads to faster thermal response times.