BaTiO3薄膜的Sol—gel法制备及对其介电特性的研究

以钛酸甲丁酯和乙酸钡为主要原料，以乙二醇独甲醚为溶剂，采用溶胶凝胶法在（１００）低阻硅片上制备了ＢａＴｉＯ３薄膜电容，用ＸＲＤ分析了该薄膜的结构，发现薄膜在硅片上取向生长，同时又对薄膜的介电性质进行研究，结果表明，薄膜的介电特性在高频范围内随频率的变化比较稳定，并讨论了晶化温度对薄电容的影响。

Preparation of BariumTitanate Thin Film by the Sol-gelTechnique and the Study on Dielectric Properties

BaTiO₃ thin film were prepared on Si(100)substract by sol-gel technique using ethylene glycol monomethyl ether as solevnt,bariumacetate and titanium tetrabutoxide as precursor.X-ray diffraction were used to studystructure,it shows that the polycrystalline BaTiO₃ thin film with someorientation were obtained.Their dielectric properties were measured,and the effect of theincreasing crystalline temperature on the property were observed,that is increasing thecapatiancy of the thin film.