| 激光诱导醋酸铜乙醇溶液反应直写金属铜线 |
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| 引用本文： | 谢湘华,张谊华,方尔梯,膝玉美,曾宪康,杨永刚,黄宣劭. 激光诱导醋酸铜乙醇溶液反应直写金属铜线[J]. 应用激光, 1996, 0(6) |
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| 作者姓名： | 谢湘华 张谊华 方尔梯 膝玉美 曾宪康 杨永刚 黄宣劭 |
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| 作者单位： | 华东理工大学化学物理研究室，上海市激光技术研究所 |
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| 摘 要： | 用ＣＯ２激光辐照诱导醋酸铜乙醇溶液反应，在石英衬底上激光直写得到金属铜线，研究了不同的写线速度对激光直写的效果，得到一个最佳的写线速度，该写线速度随激光强度的增大而提高。
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| 关 键 词： | CO_2激光，醋酸铜溶液，激光直写，金属铜线，直写速度 |
Direct Writing Copper Line from Copric Acetate in Alcohol Solution Reaction Induced by CO_2 Laser |
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| Xie Xianghua,Zhang Yihua,Teng Yumei,Fang Erti, Zeng Xiankang. Direct Writing Copper Line from Copric Acetate in Alcohol Solution Reaction Induced by CO_2 Laser[J]. Applied Laser, 1996, 0(6) |
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| Authors: | Xie Xianghua Zhang Yihua Teng Yumei Fang Erti Zeng Xiankang |
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| Abstract: | Copper lines are directly written on a quartz substract from copric acetate in alcohol solution reaction induced by a CO2 laser. The effect of the laser direct writing speed on thequality of copper line is studied. The result shows that when the other conditions are in suitablevalues there is a optimum writing speed. The value increases with the laser power. |
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| Keywords: | CO_2 laser copric acetate solution laser direct writing copper line |
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