Study of diamond film nucleation by ultrasonic seeding in different solutions |
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| Authors: | Marián Varga Tibor I?ák Alexander Kromka Marian Vesely Karel Hru?ka and Miroslav Michalka |
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| Institution: | (1) Institute for Functional Nanomaterials, University of Puerto Rico, San Juan, PR 00931, USA;(2) Department of Physics, University of Puerto Rico, San Juan, PR 00931, USA;(3) Department of Chemistry, University of Puerto Rico, San Juan, PR 00931, USA |
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| Abstract: | In this study we have investigated diamond nucleation on Si substrates by ultrasonic seeding with different liquid solutions
of Ultradispersed Detonation Diamond (UDD) powder in a mixture of metal nano- or microparticles (Ni, Co, Y). The influence
of different solutions on nucleation efficiency was investigated. For highlighting nucleation centers and better evaluation
of the nucleation process the nucleated samples were moved into a Microwave Plasma Enhanced Chemical Vapor Deposition (MW
CVD) reactor and a ”short-time” (10 min), then followed by a ”long-time” (+1 hour), diamond deposition was performed. The
morphology of samples was characterized by Scanning Electron Microscopy (SEM) and the chemical composition of grown diamond
layer was investigated by Raman Spectroscopy. From the measurements we found out that microsized metal particles positively
influenced nucleation and the uniformity of the deposited diamond thin film. The lowest surface roughness was achieved in
the case of nanodiamond powder mixed with Co and Y metal powder. The influence of Ni, Co and Y to the nucleation and early
growth stage are discussed. |
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