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Direct fabrication of freely movable microplate inside photosensitive glass by femtosecond laser for lab-on-chip application |
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| Authors: | M?Masuda |
| Institution: | (1) RIKEN-The Institute of Physical and Chemical Research, 2-1 Hirosawa, Wako, 351-0198 Saitama, Japan;(2) Department of Applied Electronics, Faculty of Industrial Science and Technology, Tokyo University of Science, Yamazaki 2641, Noda, 278-8510 Chiba, Japan;(3) Department of Electrical Engineering, Tokyo Denki University, Nishiki-cho 2-2, Kanda, Chiyoda-ku, 101-8457 Tokyo, Japan;(4) HOYA Photonics Corporation, Hikawacho 3-5-24, Toda, 335-0027 Saitama, Japan |
| Abstract: | We demonstrate the fabrication of complicated three-dimensional (3D) microstructures embedded in a photosensitive glass by a high-order multiphoton process using a femtosecond (fs) laser. Direct writing of the fs laser followed by a post baking process and preferential etching in a dilute hydrofluoric (HF) acid solution results in a microplate that can freely move in hollow structures embedded in the glass. The fabricated structure functions as a microvalve that can control the flow direction of fluids in the microreactor. PACS 42.62.-b; 81.05.Kf; 82.50.Pt |
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