Thin Polymer Films by the Glow-Discharge Indirect Method |
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Authors: | Shinzo Morita Goro Sawa Masayuki Ieda |
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Institution: | 1. Department of Electrical Engineering , Meijo University , Nagoya, 468, Japan;2. Department of Electrical Engineering , Nagoya University , Nagoya, 464, Japan |
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Abstract: | The growing mechanism and the structure of thin polystyrene film by the glow discharge-indirect method are discussed. A theoretical relationship between the growth rate of polymerized film and the discharge condition is deduced on the basis of Poll's model, taking the charge transport processes in the discharge space into consideration: 1) the ambipolar diffusion, 2) the recombination of charges forming the ion sheath, and 3) the effect of stray capacity. Substitution of possible values of physical parameters on the gaseous plasma into the theoretical relation give a reasonable growth rate which agrees well with the experimental results. From NMR, ESR, and dielectric experiments, it is suggested from the molecular and morphological structure of the film that small molecules and free radicals remain, but most of the film consists of a three-dimensional mesh structure. |
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