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| 基于PMD的反射镜面检测实验分析 | |
| 引用本文： | 赵文川,范斌,伍凡,苏显渝,陈文静. 基于PMD的反射镜面检测实验分析[J]. 光学学报, 2013, 33(1): 112002-101 |
| 作者姓名： | 赵文川 范斌 伍凡 苏显渝 陈文静 |
| 作者单位： | 赵文川:中国科学院光电技术研究所, 四川 成都 610209 范斌:中国科学院光电技术研究所, 四川 成都 610209 伍凡:中国科学院光电技术研究所, 四川 成都 610209 苏显渝:四川大学电子信息学院光电系, 四川 成都 610065 陈文静:四川大学电子信息学院光电系, 四川 成都 610065 |
| 基金项目： | 国家自然科学基金(60838002)和中科院西部之光博士资助课题。 |
| 摘 要： | 将相位测量偏折术应用于非球面反射镜面形检测,并对实验检测结果的中高频误差进行了分析研究。计算机产生正弦性条纹图,并且显示在薄膜场效应晶体管显示屏上。摄像机通过被测反射镜观察并拍摄显示屏上的条纹图。利用相移技术和相位展开技术计算得到相位分布。以相位信息为载体对光线进行追迹,并根据反射定律得到面形梯度分布,由数值积分重建面形分布。最后使用泽尼克多项式拟合分析了其中高频误差。 |
| 关 键 词： | 测量 面形测量 非球面镜 条纹分析 |
| 收稿时间： | 2012-07-17 |
Experimental Analysis of Reflector Test Based on Phase Measuring Deflectometry |
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| Zhao Wenchuan,Fan Bin,Wu Fan,Su Xianyu,Chen Wenjing. Experimental Analysis of Reflector Test Based on Phase Measuring Deflectometry[J]. Acta Optica Sinica, 2013, 33(1): 112002-101 | |
| Authors: | Zhao Wenchuan Fan Bin Wu Fan Su Xianyu Chen Wenjing |
| Affiliation: | 1Institute of Optics and Electronic,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China 2Department of Opto-Electronics,Sichuan University,Chengdu,Sichuan 610064,China) |
| Abstract: | The aspherical reflector surface is tested based on basic phase measuring deflectometry, and the mid-high frequency error of result is studied. The intensity-modulated patterns are displayed on the thin film transistor screens. The camera observes and records the fringe pattern reflected by the tested reflector. The phase distribution is obtained by the phase-shifting and phase unwrapping technique. The surface normal is obtained through ray trace, the surface profile gradient distribution is obtained according to reflection law. And the surface is reconstructed by numerical integration. The mid-high frequency error is studied by the Zernike polynomial fitting. |
| Keywords: | measurement surface measurements nonspherical mirror surfaces fringe analysis |
| 本文献已被 CNKI 等数据库收录！ | |