Dynamic two-frequency interferometry for small displacement measurements |
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| Authors: | Y Ohtsuka M Tsubokawa |
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| Institution: | The authors are in the Department of Engineering Science, Faculty of Engineering, Hokkaido University, Sapporo 060, Hokkaido, Japan |
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| Abstract: | Two-frequency interferometry for small displacement measurements is examined from a practical point of view. A laser beam that is modulated sinusoidally in intensity by an acousto-optic Bragg cell provides signal and reference optical waves to produce dynamic interference. The output signal of a photodetector receiving the interference is composed of optical homodyne and heterodyne components. The heterodyne component carries a vibrational displacement to be detected on its amplitude. A sinusoidal vibration amplitude is measured down to 0.5 nm. |
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| Keywords: | interferometry dimensional measurement Bragg cells |
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