Copper L X-ray spectra measured by a high resolution ion-induced X-ray spectrometer

High resolution L X-ray emission spectra of Cu have been measured by 0.75 MeV/u H, He, and F, 0.73 MeV/u Ar, 0.64 MeV/u Si, and 0.073 MeV/u Si ion impacts with a crystal spectrometer. The X-ray transition energies in the Cu target for Lι, Lη, L_1,2, Lβ₁, and Lβ_3,4 diagram lines induced by H ion impact are determined, which are in good agreement with those given in the reference by Bearden (Rev. Mod. Phys. 39, 78, 1967). The X-ray spectra produced by F, Si, and Ar ions have complicated structures due to multiple L and M shell vacancy production. The L_1,2 and Lβ₁ emission spectra for H and He ions are compared with the calculated ones based on the multiconfiguration Dirac-Fock method. The origin of the broadening of the L_1,2 line to the lower energy for H ion impact is attributed to one 2p plus one 3d electron vacancy production.