| 热稳定自旋阀磁传感器及其性能优化研究 |
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| 引用本文： | 郑洋,曲炳郡,叶双莉,李伟,任天令,刘理天.热稳定自旋阀磁传感器及其性能优化研究[J].微纳电子技术,2007(Z1). |
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| 作者姓名： | 郑洋 曲炳郡 叶双莉 李伟 任天令 刘理天 |
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| 作者单位： | 清华大学微电子所 北京100084 |
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| 摘 要： | 对一种Ta/NiFeCr/CoFe/Cu/CoFe/MnIr/Ta结构的顶钉扎自旋阀进行了优化。对自旋阀各层材料在整个结构中所起的作用进行了分析,并通过实验,研究自旋阀中每一层的厚度对磁电阻变化率(MR)的影响。最终得到了在80℃下磁电阻变化率高达10.5%的GMR自旋阀。
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| 关 键 词： | 巨磁电阻 自旋阀 磁传感器 |
Investigation on the Performance of Spin Valve Magnetic Sensor with Thermal Stability |
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| ZHENG Yang,QU Bing-jun,YE Shuang-li,LI Wei,REN Tian-ling,LIU Li-tian.Investigation on the Performance of Spin Valve Magnetic Sensor with Thermal Stability[J].Micronanoelectronic Technology,2007(Z1). |
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| Authors: | ZHENG Yang QU Bing-jun YE Shuang-li LI Wei REN Tian-ling LIU Li-tian |
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| Abstract: | A top-pinned giant magnetorisistive(GMR) spin-valve with a structure of Ta/NiFeCr/CoFe/Cu/CoFe/MnIr/Ta was optimized.The influence of each layer in this spin-valve was analyzed,and some experiments upon the function of layer thickness on the magnetoresistance were done.Finally,a structure with GMR ratio of 10.5% was obtained,even under 80 ℃WTBZ]. |
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| Keywords: | giant magnetoresistance spin valve magnitic sensor |
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