| 基于MEMS技术的平面W型微弹簧刚度特性研究 |
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| 引用本文： | 何光,石庚辰.基于MEMS技术的平面W型微弹簧刚度特性研究[J].北京理工大学学报,2006(5):471-474. |
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| 作者姓名： | 何光 石庚辰 |
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| 作者单位： | 北京理工大学机电工程学院,北京100081;北京理工大学机电工程学院,北京100081 |
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| 摘 要： | 为了方便平面W型微弹簧的设计和制造,对其刚度特性表征方面进行了研究.运用能量方法推导出平面W型微弹簧弹簧常数计算公式.通过镍质平面W型微弹簧的实际拉伸实验,对推导出的微弹簧弹簧常数计算公式进行了验证,公式计算结果与测试结果基本相符.同时在有限元模拟分析软件———ANSYS中进行了仿真计算,二者一致性很好.在公式和仿真计算的基础上,找出了各结构参数对其刚度的影响规律.研究结果为平面W型微弹簧的优化设计与加工提供了理论指导.
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| 关 键 词： | MEMS弹簧 弹簧常数 能量法 有限元方法 |
| 收稿时间： | 2005/11/8 0:00:00 |
Study on Stiffness Characterization of Planar W-Form Micro-Springs Based on MEMS Technology |
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| HE Guang and SHI Geng-chen.Study on Stiffness Characterization of Planar W-Form Micro-Springs Based on MEMS Technology[J].Journal of Beijing Institute of Technology(Natural Science Edition),2006(5):471-474. |
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| Authors: | HE Guang and SHI Geng-chen |
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| Institution: | School of Mechatronic Engineering,Beijing Institute of Technology,Beijing 100081,China;School of Mechatronic Engineering,Beijing Institute of Technology,Beijing 100081,China |
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| Abstract: | To make the design and fabrication of planar W-form micro-springs based on MEMS technology convenient,expressions used to calculate the micro-spring made of different materials constant by its structural parameters are derived by energy method,and subsequently verified correct with tensile test and ANSYS finite element method using nickel planar W-form micro-springs.The stiffness response of the micro-spring to its structural parameters was also analyzed by the formula precedingly derived and the simulation results.Therefore the reliability and the optimization design of MEMS can be improved. |
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| Keywords: | MEMS spring spring constant energy method finite element method(FEM) |
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