| 高温超导滤波器的光刻工艺 |
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| 引用本文： | 慕利娟,赵宏宇. 高温超导滤波器的光刻工艺[J]. 低温与超导, 2009, 37(3) |
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| 作者姓名： | 慕利娟 赵宏宇 |
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| 作者单位： | 内蒙古科技大学数理与生物工程学院,包头,014010 |
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| 摘 要： | 根据高温超导薄膜的特点,详细讨论了制备高温超导滤波器的光刻技术及在制备的各环节中需注意的问题,实验结果表明:此种方法提高了制备的成功率。
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| 关 键 词： | 高温超导薄膜 滤波器 光刻 |
Photolithography of the high temperature superconducting filter |
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| Mu Lijuan,Zhao Hongyu. Photolithography of the high temperature superconducting filter[J]. Cryogenics and Superconductivity, 2009, 37(3) |
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| Authors: | Mu Lijuan Zhao Hongyu |
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| Affiliation: | School of Mathematics Physics and Biological Engineering;Inner Mongolia University of Science & Technology;Baotou 014010;China |
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| Abstract: | According to the characteristics of HTS films,we discussed the problems in photolithography and fabrication processes of the HTS filter in detail.The results show that the technology can improve mission success rate of the preparation. |
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| Keywords: | HTS films Filter Photolithography |
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