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Effect of surrounding gas condition on surface integrity in micro-drilling of SiC by ns pulsed laser |
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| Authors: | Yasuhiro Okamoto Kiichi Asako Norio Nishi Tomokazu Sakagawa Akira Okada |
| Institution: | 1. Okayama University, 3-1-1 Tsushimanaka, Kita-ku, Okayama, 700-8530, Japan 2. Kataoka Corporation, 140 Tsukiyama-cho Kuze, Minami-ku, Kyoto, 601-8203, Japan 3. Kataoka Corporation, 2-14-27 Shinyokohama, Kohoku-ku, Yokohama, 222-0033, Japan |
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| 本文献已被 SpringerLink 等数据库收录！ | |