相移干涉计量中相移器的同光路自动标定

基于相移干涉计量的基本原理，提出用相移ＥＳＰＩ光场的空间平均方法计算相位，不仅可实现相移干涉计量中相移器的同光路自动标定，而且还可以得到测量光场及所用相移器的计量特性．最后，将该标定方法所得相位值与等间距条纹相位标定值进行了比较，得到两者相对误差在可用电压区域内小于３％．

Phase Shifter Automatic Calibration with the Same Optical System in Phase-Shifting interferometry

A method for phase calculating by spoilal averaging over shift ESPI optical field is proposed based on the principle of phals-shifting interferometry. It is possible to realize phase shifter calibration automatically with the same optical system, and to obtain the measurement characteristics of the optical field and the Phase shifter. We have compared this method with equidistant fringe phase calibration, and the relative error between the two ways is less than 3%, within the usable voltage range.