Influence of the substrate temperature on the initial stages of growth of barium strontium titanate films on sapphire

The initial stages of growth of ferroelectric films of barium strontium titanate BaSrTiO₃ on singlecrystal sapphire substrates have been experimentally investigated as a function of the deposition temperature. It has been shown that, at the initial stage of the condensation of the BaSrTiO₃ film on sapphire, the temperature of the substrate determines the mechanisms of mass transfer of deposited atoms and the processes of nucleation.