Distribution of 28Si, 29Si,and 30Si isotopes under plastic deformation in subsurface layers of Si: B crystals

The redistribution of ²⁸Si, ²⁹Si, and ³⁰Si isotopes in subsurface layers of Si: B single crystals after their plastic deformation has been revealed. It has been found that the distribution profile of ²⁸Si and ²⁹Si isotopes becomes smoother after deformation, whereas the ³⁰Si isotope distribution remains unchanged. A change in the subsurface profile of the ²⁹SiO oxide is observed, which indicates the migration of the ²⁹Si isotope in the composition of oxygen complexes during plastic deformation.