| 金刚石薄膜的红外增透性 |
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| 引用本文： | 杨国伟,毛友德.金刚石薄膜的红外增透性[J].半导体光电,1992,13(2):148-150,182. |
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| 作者姓名： | 杨国伟 毛友德 |
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| 作者单位： | 合肥工业大学应用物理系，合肥工业大学应用物理系 合肥 230009，合肥 230009 |
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| 摘 要： | 以 CH_3COCH_3/H_2为工作气体,用 HFCVD 方法,制备出适用于红外光学的金刚石薄膜。用 SEM 观察到了所制备膜的表面晶形。讨论了金刚石薄膜的红外增透性。
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| 关 键 词： | 金刚石薄膜 表面晶形 红外增透性 |
On Infrared Transmissivity of Thin Diamond Films |
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| Yang Guowei Mao Youde Dept.of Appl.Phys.,Hefei University of Technology Hefei.On Infrared Transmissivity of Thin Diamond Films[J].Semiconductor Optoelectronics,1992,13(2):148-150,182. |
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| Authors: | Yang Guowei Mao Youde Deptof ApplPhys Hefei University of Technology Hefei |
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| Institution: | Yang Guowei Mao Youde Dept.of Appl.Phys.,Hefei University of Technology Hefei 230009 |
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| Abstract: | Thin diamond films used for infrared optics have been prepared by HFCVD using CH_3COCH_3/H_2 as an operating gas.Surface crystal formation of the prepared films is observed by SEM,and their infrared transmissivity is discussed. |
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| Keywords: | Thin Diamond Film Surface Crystal Formation Infrar(?)d Transmissivity |
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