Nanostructure investigations with the analytical transmission electron microscope |
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| Authors: | H-D Bauer Reinhold Rennekamp Jürgen Thomas |
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| Institution: | Institut für Festk?rper- und Werkstofforschung Dresden, Postfach 270016, D-01171 Dresden, Germany, DE
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| Abstract: | Concerning the conventional TEM-imaging as well as the analytical procedures the capabilities are pointed out: electron diffraction,
energy dispersive X-ray spectroscopy (EDXS) and electron energy loss spectroscopy (EELS). The possibilities of investigation
of both nanocrystalline materials and multilayers are discussed, accompanied by examples of current investigations: At alloys,
produced by intense milling, at single nanocrystals the imaging by diffraction contrast was successful, the analysis has failed
because of the sample thickness. By means of energy spectroscopic imaging multilayers from Fe-SiB/NbCu and Fe/Cr as well as
Al2O3/TiN have been characterized.
Received: 15 July 1997 / Revised: 16 February 1998 / Accepted: 21 February 1998 |
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