| 二维光栅频谱分析及在精密测量中的应用 |
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| 引用本文： | 夏豪杰,费业泰,王中宇.二维光栅频谱分析及在精密测量中的应用[J].光子学报,2007,36(4):726-729. |
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| 作者姓名： | 夏豪杰 费业泰 王中宇 |
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| 作者单位： | 合肥工业大学,仪器科学与光电工程学院,合肥,230009;北京航空航天大学,仪器科学与光电工程学院,北京,100083 |
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| 基金项目： | 国家自然科学基金
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河南省杰出青年科学基金 |
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| 摘 要： | 根据傅里叶光学的相关理论对二维衍射光栅的频谱特性进行了分析,并对分析结果进行了模拟和实验验证；基于衍射光栅应用于微位移的理论,提出利用二维衍射光栅作为测量的基准元件,组成单个光源和单二维衍射光栅的二维平面微位移精密测量系统,并根据实验测量结果验证了这是一种具有纳米准确度的可行测量方法.
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| 关 键 词： | 测量 二维光栅 频谱分析 位移 |
| 文章编号： | 1004-4213（2007）04-0726-4 |
| 收稿时间： | 2006-02-10 |
| 修稿时间： | 2006-02-10 |
The 2-D Grating's Spectrum Analysis and Application in Precise Measurement |
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| XIA Hao-jie,FEI Ye-tai,WANG Zhong-yu.The 2-D Grating's Spectrum Analysis and Application in Precise Measurement[J].Acta Photonica Sinica,2007,36(4):726-729. |
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| Authors: | XIA Hao-jie FEI Ye-tai WANG Zhong-yu |
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| Institution: | 1 School of Instrumentation Science and Photoelectricity Engineering,Hefei University of Technology,Hefei 23009,China;2 School of Instrumentation Science and Photoelectricity Engineering,Beihang University,Beijing 100083,China |
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| Abstract: | The Fourier method was employed to analyze the spectrum of 2-D diffraction grating,the induced results were simulated in Matlab, and the simulation was verified by the experimental photo.On the basic of these results,2-D diffraction grating used to measure 2-D displacements with high precision in nano-scale resolution, the structure using 2-D grating was given,interfere fringes were pictured,and the experimental results can meet the nano resolution measurement. |
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| Keywords: | measurement 2-D grating spectrum analysis displacement |
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