Surface excitation effects in elastic peak electron spectroscopy

Surface electron inelastic excitations, a consequence of electron-surface interaction, effect the measured intensities in surface-sensitive electron spectroscopic methods and distort the quantitative information. This phenomenon is more pronounced at low electron energy and glancing emission angles. In this work we investigate quantitatively the influence of the surface excitation effects on the measured electron elastic backscattering probability. As a model system we used Si, Cu and Al, i.e. materials with different surface excitation properties. Results obtained show that properly corrected measured elastic electron backscattering probabilities lead to inelastic mean free path values which compare well with the theory.