A spectroscopic study of CNx formation by the keV N2 irradiation of highly oriented pyrolytic graphite surfaces |
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| Authors: | D.-Q. YangE. Sacher |
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| Affiliation: | Département de Génie Physique and Groupe des Couches Minces, École Polytechnique, C.P. 6079, succursale Centre-Ville, Montréal, Que., Canada H3C 3A7 |
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| Abstract: | Amorphous carbon nitride (CNx) thin layer, formed by the keV N2+ irradiation of highly oriented pyrolytic graphite, has been investigated using X-ray photoelectron and raman spectroscopies, and time-of-flight secondary ion mass spectrometry. C1s X-ray photoelectron spectroscopy (XPS) peak separations indicate that C-N bonds form over and above the graphite fragmentation previously obtained on Ar+ irradiation. N1s XPS peak separations indicate three components. Their attributions, and the resultant CNx structure, are confirmed by angle-resolved XPS and TOF-SIMS analyses. |
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| Keywords: | Nitrides Graphite Ion bombardment X-ray photoelectron spectroscopy Raman scattering spectroscopy Secondary ion mass spectroscopy |
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