| 半导体薄膜在航天器上的应用 |
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| 引用本文： | 卢榆孙,李华,韩小文. 半导体薄膜在航天器上的应用[J]. 光学技术, 1990, 0(1) |
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| 作者姓名： | 卢榆孙 李华 韩小文 |
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| 摘 要： | 本文简述了在控制航天器表面充电状态中,若干种半导体薄膜的应用,讨论了应用平面磁控反应溅射方法制备氧化铟和氧化铟锡薄膜的工艺,对其透光性与制备时的气氛条件及膜厚的关系也作了说明。
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| 关 键 词： | 半导体薄膜 磁控溅射 |
Application of Semicondutive Films on Spacecraft |
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| La Yusun Li Hua Han Xiaowen. Application of Semicondutive Films on Spacecraft[J]. Optical Technique, 1990, 0(1) |
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| Authors: | La Yusun Li Hua Han Xiaowen |
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| Affiliation: | La Yusun Li Hua Han Xiaowen |
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| Abstract: | The application of several semiconductive films on the charging control of spacecraft surfaces is discussed. The preparation and technology of indium oxide/tin oxide film, indium oxide film and tin oxide film by reactive magnetron sputtering bas been narrated. The relation of the transparence to oxygen partial pressure and film thickness has alos heen illustrated. |
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| Keywords: | Semiconductive film magnetron sputtering |
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