硅衬底的SrTiO3淀积膜的湿敏特性与机理研究

对无定形多孔SrTiO₃膜电导率随相对湿度的变化进行了理论模型分析.该模型也适用于其他多孔半导体陶瓷材料.实验样品用氩离子束镀膜技术在SiO₂/Si衬底上淀积SrTiO₃膜并制成平面型电阻结构.结果表明，在室温下，当相对湿度从12%变化至53%时，电流缓慢下降；而当相对湿度从53%变化至92%时，电流又显著上升，即在高湿度条件下具有良好的湿敏特性.电流及其在高湿条件下的上升率随测试频率而增大.吸附响应时间明显长于脱附时间. 关键词：

SENSITIVITY OF HUMIDITY AND ITS MECHANISM FOR SrTiO3 FILMS DEPOSITED ON SiO2/Si SUBSTRATE

A new theoretical model for SrTiO₃ physisorption and chemisorption has been developed to quantitatively analyze the effect of relative humidity on electrical conductivity of the amorphous porous SrTiO₃ film.This model may also be applied to other type of porous semiconductor ceramics.In this paper,the SrTiO₃ film is deposited on SiO₂/Si substrate by using the argon-ion beam plating technique,and then formed a planar resistor structure on SrTiO₃ film. The experimental results show that, at room temperature,the current decreases slowly when relative humidity changes from 12% to 53%, and then increases rapidly with the increase of relative humidity from 53% to 92%.The current and its rate of change increase with increasing test frequency.The response time of water adsorption is longer than desorption.