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Plasma deposition of silicon-containing layers on polymer substrates |
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| Authors: | Fabio Garbassi Ernesto Occhiello |
| Abstract: | Plasma-polymerized coatings have been deposited on polymer substrates using mixtures of silicon-containing monomers with O2 and/or CF4. With ternary gas mixtures, novel silicon oxyfluoride coatings were obtained. By oxygen plasma post-treatment, improvements in barrier properties of polymer substrates to gases were observed. |
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