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大电流密度碳纳米管场致发射阴极阵列的研制
引用本文:陈泽祥,曹贵川,张强,朱炳金,林祖伦.大电流密度碳纳米管场致发射阴极阵列的研制[J].强激光与粒子束,2006,18(12):2070-2073.
作者姓名:陈泽祥  曹贵川  张强  朱炳金  林祖伦
作者单位:电子科技大学 光电信息学院, 成都 610054
基金项目:四川省应用基础研究计划
摘    要: 设计了一种由TiN,Al,Fe和牺牲层构成的堆栈式催化剂层结构,采用微波等离子体化学气相沉积法实现碳纳米管阵列高速笔直生长。SEM和TEM结果表明,生长出来的碳纳米管为典型的多壁碳纳米管,长度和直径均匀,排列整齐并垂直于基底,生长速率大于5 μm/min,晶格缺陷少。场致发射测试结果表明:碳纳米管的发射阵列具有良好的电流发射稳定性,最大电流密度大于6 A/cm2。紫外光电子能谱法(UPS)测试出碳纳米管的功函数为4.59 eV,则相应的场致发射陈列的场增强因子大于1 400。

关 键 词:碳纳米管  化学气相沉积法  场致发射  加速器
文章编号:1001-4322(2006)12-2070-04
收稿时间:2006-08-08
修稿时间:2006-09-15

Fabrication of large current density carbon nanotube based field emitters
CHEN Ze-xiang,CAO Gui-chuan,ZHANG Qiang,ZHU Bing-jin,LIN Zu-lun.Fabrication of large current density carbon nanotube based field emitters[J].High Power Laser and Particle Beams,2006,18(12):2070-2073.
Authors:CHEN Ze-xiang  CAO Gui-chuan  ZHANG Qiang  ZHU Bing-jin  LIN Zu-lun
Institution:School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China
Abstract:A synthesis of carbon nanotubes(CNT) for field emission was grown speedly and vertically by microwave plasma chemical vapor deposition with a multi-layered stack as the catalyst lay. The SEM and TEM analysis results of the CNT samples showed that as-grown CNT were typical multi-layered ones with few defects, aligned and straight, and uniform in diameter and length. The growth rate of CNT was more than 5 μm/min. The field emission results showed that the as-grown CNT emission array presented excellent and stable field emission with current density more than 6 A/cm2. The work function of the as-grown CNT was 4.59 eV measured by UPS and the corresponding field factor was about 1 400.
Keywords:Carbon nanotubes  Chemical vapor deposition(CVD)  Field emission  Accelerator  
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