The Effect of Point Defects on the Activation Processes in Semiinsulating GaAs Irradiated by Si28 Ions

The layered concentration, concentration profile, and mobility of electrons in the Si²⁸ ion-implanted layers (IIL) of semiinsulating GaAs are investigated. The specific resistance of the latter is also studied upon radiation annealing (RA) in the temperature range 590–800 °C using electron energies higher than the threshold energy of defect formation. The IIL are shown to form during RA at much lower temperatures. The layers exhibit high electrical activation of Si²⁸ ions, with the electron-concentration profile corresponding to the calculated one, and a low concentration of residual defects limiting the electron mobility. The radiation annealing increases the resistance of semiinsulating GaAs. The calculations show that these effects are due to the Frenkel pairs (FP) generated by radiation. A high degree of ionization of GaAs atoms significantly reduces energies of potential barriers of diffusion, FP recombination, and electrical impurity activation.