Moiré deflectometry—ray tracing interferometry

A method for ray deflection mapping, moiré deflectometry, which is fully compatible with interferometry, is described and demonstrated by numerous examples, including testing of optical components, visualization of flow, study of transient phenomena, and modulation transfer function analysis. Unlike interferometry, moiré deflectometry is a pure ray tracing technique and, therefore, the analysis of three- dimensional objects is greatly simplified. Although the ray tracing approach to optical systems is much older than wave theory, moiré deflectometry seems to be the first attempt to apply ray tracing methods systematically to optical metrology. Moiré deflectometry is fully quantitative, interferometry-compatible in accuracy and has the additional advantage of tunable sensitivity.