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Development of three-dimensional microfabrication method using thermo-sensitive resin |
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| Authors: | S?Yamakawa |
| Institution: | (1) Institute of Technology, Graduate School of Tokyo, 2-12-1, O-okayama, Meguro-ku, Tokyo, 152-8552, Japan;(2) Department of Mechanical and Environmental Informatics, Tokyo Institute of Technology, 2-12-1, O-okayama, Meguro-ku, Tokyo, 152-8552, Japan;(3) Creo Inc., 3700 Gilmore Way, Burnaby, BC, V5G 4M1, Canada;(4) Mitsubishi Chemical Group Science and Technology Research Center, Inc., 1000, Kamoshida-cho, Aoba-ku, Yokohama, 227-8502, Japan;(5) The University of British Columbia, 2329 West Mall, Vancouver, BC, V6T 1Z4, Canada |
| Abstract: | We have developed a three-dimensional microfabrication method using thermo-sensitive resin. This method exploits the fact that polymerization of thermo-sensitive resins does not obey the law of linear superposition. Three-dimensional (3D) objects are created inside the thermo-sensitive resin by 3D scanning of the volume with a focused laser. Fabrication with the focus of the laser inside the resin can achieve good accuracy and high resolution of the structure. A fabrication system, which consisted of a CD-R pick-up laser and an XYZ stage, was built. Nonlinear polymerizations of the thermo-sensitive resin were verified by fabrication in various conditions of laser intensity and exposure time. In order to demonstrate the present method, a simple 3D microstructure was fabricated inside the resin. PACS 42.62.Cf; 42.70.Jk; 42.82.Cr |
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