Preparation of size controllable copper nanocrystals for nonvolatile memory applications |
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| Authors: | Wang Li Sun Hong-Fang Zhou Hui-Hua Zhu Jing |
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| Affiliation: | Beijing National Center for Electron Microscopy, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China |
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| Abstract: | A method of fabricating Cu nanocrystals embedded in SiO2 dielectric film for nonvolatile memory applications by magnetron sputtering is introduced in this paper. The average size and distribution density of Cu nanocrystal grains are controlled by adjusting experimental parameters. The relationship between nanocrystal floating gate micro-structure and its charge storage capability is also discussed theoretically. |
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| Keywords: | nanocrystal grain nonvolatile memory Coulomb blockade effect magnetron sputtering |
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