Quartz crystal microbalance measurements of O/Ti and CO/Ti atom ratios on very thin Ti films |
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| Authors: | B Kasemo E Törnqvist |
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| Institution: | Department of Physics, Chalmers University of Technology, fack S-402 20 GothenburtSweden |
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| Abstract: | The adsorption of O2 and CO on Ti films with thicknesses in the range 0–200 Å was investigated by quartz crystal microbalance (QCM) measurements. The O/Ti and CO/Ti ratios in the limit of zero film thickness was determined to be 1.5 and 0.5 respectively using the film thickness as a parameter. This result suggests that the oxide formed is Ti2O3. The Ti + O2 results are discussed in a model where the thinnest metal films are assumed to consist of metal islands. From the model an “oxidation depth” of ≈10 Å is estimated. |
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