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Resolution of a scanning electron microscope: 1. Current state of the problem |
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| Authors: | Yu A Novikov |
| Institution: | 1. A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow, Russia |
| Abstract: | Known methods for determining the resolution of a scanning electron microscope are discussed. It is shown that none of them can unambiguously characterize the scanning electron microscope. |
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