| Abstract: | A Monte Carlo simulation code is described that is suitable for modelling low-pressure glow discharges that possess cylindrical symmetry, but are of otherwise completely variable geometry. In this single-particle simulation in 3 space and 3 velocity dimensions, an entire discharge including the cathode fall can be modelled with or without magnetic fields of arbitrary shape. Electric and magnetic fields are given externally and are not adjusted self-consistently. Collision processes are modelled in great detail, and cathode sputtering phenomena are also included in the simulation. This simulation code is applied to hollow cathode discharges with and without superimposed magnetic fields and to a Penning discharge. Exemplary results are shown that include density profiles of cathode-sputtered atoms, energy distribution functions of electrons and cathode sputtering effects for a Penning discharge. Comparisons to results from experiment and other simulations are given. |
