Injection locking of ArF excimer lasers |
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| Authors: | A C Cefalas T A King |
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| Institution: | (1) Physics Department, Schuster Laboratory, University of Manchester, M13 9PL Manchester, UK |
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| Abstract: | Injection-locking characteristics of an ArF excimer oscillator-amplifier laser are described including the use of stable-unstable optical cavities. Output intensities of 1 MW cm–2 have been produced with 3 mJ output energy, a spectral linewidth better than 5×10–3 nm and an injection locking efficiency of 0.9. |
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| Keywords: | 42 55H 42 60 |
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