Thermoelastic coupling effect on a micro-machined beam resonator |
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| Authors: | F L Guo G A Rogerson |
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| Institution: | Department of Computer and Mathematical Sciences, University of Salford, Salford M5 4WT, UK |
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| Abstract: | In this paper, the effect of thermoelastic coupling on a micro-machined resonator is studied. The calculated results show that the frequency shift ratio caused by thermoelastic coupling is of the order of 10−3, which is much larger than that of air-damping. Furthermore, the non-dimensional frequency is scale-dependent with thermoelastic coupling being considered. In contrast, the non-dimensional frequency only depends upon the ratio of thickness to length when the themoelastic coupling effect is disregarded. |
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| Keywords: | Micro-machined resonator Thermo-elasticity Frequency shift |
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