ZrO_2/SiO_2溶胶-凝胶薄膜膜层间的渗透行为

分别以丙醇锆和正硅酸乙酯为原料,采用溶胶-凝胶工艺制备了性能稳定的ZrO2和SiO2溶胶。用旋转镀膜法在K9玻璃上分别制备了单层SiO2薄膜、单层ZrO2薄膜、ZrO2/SiO2双层膜和SiO2/ZrO2双层膜。采用原子力显微镜观察了薄膜的表面形貌,用椭偏仪测量薄膜的厚度与折射率,用紫外-可见光分光光度计测量了薄膜的透射率。对薄膜的透射光谱和椭偏仪模拟的数据进行分析,发现SiO2/ZrO2双层膜之间的渗透十分明显,而ZrO2/SiO2双层膜之间几乎不发生渗透。利用TFCalc模系设计软件,采用三层膜模型对薄膜的透射率进行模拟,得出的透射曲线与用紫外-可见光分光光度计测量的透射曲线十分符合。

Infiltrating between ZrO_2 and SiO_2 Sol-Gel films

The single-layer SiO2,single-layer ZrO2,two-layer ZrO2/ SiO2 and two-layer SiO2/ZrO2 thin films were deposited on K9 glass by Sol-Gel spin-coating method.The colloidal suspension of ZrO2 was prepared using Zr(OPr)4 and colloidal suspension of SiO2 was prepared using TEOS as precursor.The surface morphologies of SiO2 and ZrO2 thin films were observed by AFM.Ellipsometry was used to measure the thickness and refractive index of the films.UV-VIS spectrophotometer was used to measure the transmittance of the films.The results showed that the infiltration of the two-layer SiO2/ZrO2 film was much serious than that of the two-layer ZrO2/ SiO2 film,which is very trifling.With the TFCalc thin film design software,the transmittance of the films was simulated with the theoretical three-layer model.The simulated results accorded with the experiments very well.