Influence of the pre-treatment anneal on Co–germanide Schottky contacts |
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Authors: | L Lajaunie ML David F Pailloux C Tromas E Simoen C Claeys JF Barbot |
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Institution: | aPHYMAT, Université de Poitiers/CNRS, UMR 6630, SMP2MI, Bd Marie et Pierre Curie, BP 30179, 86 962 Futuroscope-Chasseneuil Cedex, France;bIMEC, Kapeldreef 75, B-3001 Leuven, Belgium;cEE Department, KU Leuven, Kasteelpark Arenberg 10, B-3001 Leuven, Belgium |
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Abstract: | A thin cobalt layer is deposited by electron beam evaporation onto a germanium substrate after an in situ cleaning annealing at 400 or 700 °C. The effect of these pre-treatments on the Co/Ge Schottky barrier properties and on the germanide formation is investigated by using different techniques. A strong influence of the pre-treatment is observed. The pre-treatment at 700 °C removes the native oxide but enhances the diffusion of contaminants. After post-metal deposition annealing, the sample pre-treated at 700 °C shows a double layer structure due to interdiffusion, whereas some large isolated islands are present in the sample pre-treated at 400 °C. |
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Keywords: | Cobalt Germanium Germanide Oxide Deep-level transient spectroscopy |
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