| 新颖的双间隔RF MEM可变电容的设计与模拟 |
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| 引用本文： | 董乔华,廖小平. 新颖的双间隔RF MEM可变电容的设计与模拟[J]. 电子元件与材料, 2006, 25(1): 41-44 |
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| 作者姓名： | 董乔华 廖小平 |
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| 作者单位： | 东南大学MEMS教育部重点实验室,江苏,南京,210096;东南大学MEMS教育部重点实验室,江苏,南京,210096 |
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| 摘 要： | 设计了一种可用于射频(RF)通信系统中的MEM平行板可变电容,采用新颖的双间隔(two-gap)结构、金属铝极板、折叠“Y”形支撑和厚度不均的可动极板。用CoventorWare软件模拟了电容的C-V特性,当控制电压从0变化到10V时,RF信号电容相应从0.37pF增加到5.64pF,变容比约为15.24∶1;用HFSS软件模拟了电容的S11参数,电容的品质因数Q在1.8GHz下约为77.78。
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| 关 键 词： | 电子技术 射频 MEM可变电容 变容比 品质因数 |
| 文章编号： | 1001-2028（2006）01-0041-04 |
| 收稿时间： | 2005-08-25 |
| 修稿时间： | 2005-08-25 |
Design and Simulation of a Novel Two-gap RF MEM Variable Capacitor |
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| DONG Qiao-hua,LIAO Xiao-ping. Design and Simulation of a Novel Two-gap RF MEM Variable Capacitor[J]. Electronic Components & Materials, 2006, 25(1): 41-44 |
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| Authors: | DONG Qiao-hua LIAO Xiao-ping |
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| Affiliation: | Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China |
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| Abstract: | A MEM variable capacitor for RF communications systems was presented.The capacitor was designed using a novel two-gap structure,using aluminum as the capacitor electrode material,using “Y” shape beams as the suspend electrode spring,and using a asymmetry thickness plate as the suspend electrode.The C-V characteristic was simulated by CoventorWare software.The capacitance of the signal capacitor is variable from 0.37 pF to 5.64 pF as the control voltage is swept from 0 to 10V,and the capacitance ratio is 15.24∶1.The S11 parameter of the capacitor is obtained by HFSS software,and the Q factor is 77.78 at 1.8 GHz. |
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| Keywords: | electronic technology RF MEM variable capacitor capacitance ratio quality factor |
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