光谱分析方法测试GMLM微间距的实验和方法推广

基于MEMS的光栅平动式光调制器(GMLM)依靠结构中可动光栅和下反射镜之间的微间距的变化来实现光的调制作用，被应用于显示领域。可动光栅和下反射镜之间的微间距是一个关键的参数，传统的测试方法如台阶仪等要破坏结构，WYKO白光干涉仪测量成本高，所以要寻求一种测试成本较低、测量精度较高的测试方法。文章采用非接触的波长扫描式光谱分析方法进行了GMLM可动光栅和下反射镜之间的微间距测试实验研究。实验表明：实验结果和理论分析吻合，验证了理论模型的正确性；对比WYKO白光干涉仪测试，该方法的相对测试误差小于1%；具有很好的重复性。对该光谱分析方法进行了推广，从理论上推导了该方法可以实现准动态测量GMLM器件吸合电压、共振频率以及其他基于衍射/干涉的MEMS器件的微小间距测试等。

Experiments of Micro-Distance Measurement for GMLM with Spectrum Analysis Method

Projection display devices are undergoing a period of multi-development, and with the maturation of MEMS technology, which leads to MEMS-based light modulators for display applications, have become one of the research focuses. The structure of MEMS-based grating moving light modulator (GMLM) is composed of the reflection plate, address electrode and four cantilevers, and movable grating plate, which is supported by four crab-cantilevers placed around, and is actuated like a piston by electrostatic force. The piston-type motion of grating can be used to modulate the phase of incident light. The micro-distance between the upper surface of movable grating and underlying reflector is a key parameter and is important to GMLM performance. Traditional measurement method such as step-machine would destroy the device; while a high accuracy and non-contact measurement machine called KYKO White Light Interferometer is expensive. In the present paper, the GMLM optical principle using scalar diffraction theory was in details analyzed. A novel non-contact wavelength scanning spectrum analysis method was put forward to measure the distance between the upper surface of movable grating and underlying reflector. The U-4100 spectrophotometer was adopted to gain spectrum information; while the spectrum analysis method using peak wavelength position was introduced to calculate the micro distance. The measurement result is consistent to theoretical result. The micro-distance is 1.131 3 microm using such non-contact wavelength scanning spectrum analysis method, while it is 1.240 0 microm with WYKO White Light Interferometer. The relative error was lower than 1%, compared with the results measured by WYKO White Light Interferometer, and the method has good repetition ability and is cheap with RMB50 Yuan each time. Furthermore, measuring pull-in voltage, resonance frequency and micro distance in MEMS-based diffraction and interference devices was proposed completely based on such non-contact wavelength scanning spectrum analysis method.