基于MEMS开关的可调实时延时器设计

为了有效解决相控阵雷达/天线瞬时带宽小、孔径效应严重、功耗大等问题，将射频MEMS开关引入实时可调延时器结构中，设计了一种基于射频MEMS开关的实时可调延时器。通过MEMS双掷开关选择具有不同电长度的延时路径，在DC～20 GHz内实现了5位的射频信号延时。利用HFSS三维电磁仿真软件对延时单元的几何参数进行仿真优化，得到5个可切换延时状态的延时量，分别为64.76 ps, 101.46 ps, 137.97 ps, 174.61 ps, 210.98 ps,延时步进为36.5 ps,整体面积约为5 mm²。与其他实时可调延时器相比，该实时可调延时器具有多可控位数、大延时带宽积、高集成度等优点。

Design of an Adjustable True-Time Delayer Based on RF MEMS Switch

To effectively solve the problems of small transient bandwidth, serious aperture effect, and high power consumption of phased array radar/antenna, an RF MEMS switch was introduced into the true-time adjustable delay structure, and an adjustable true-time delayer based on the RF MEMS switch was designed. The delay paths with different electrical lengths were selected by MEMS double-throw switches to achieve 5-bit RF signal delay in DC~20 GHz. The geometric parameters of the delay unit were simulated and optimized by using HFSS three-dimensional electromagnetic simulation software. The delay quantities of five switchable delay states are obtained, which are 28.34 ps, 64.76 ps, 101.46 ps, 137.97 ps, 174.61 ps, and 210.98 ps, respectively. The delay step is 36.5 ps, and the overall area is about 5 mm³. Compared with other true-time adjustable delayers, the proposed true-time adjustable delayers has the advantages of multiple controllable bits, a considerable delay bandwidth product and high integration.