High Performance Three‐Dimensional Chemical Sensor Platform Using Reduced Graphene Oxide Formed on High Aspect‐Ratio Micro‐Pillars |
| |
| Authors: | Le Thai Duy Duck‐Jin Kim Tran Quang Trung Vinh Quang Dang Bo‐Yeong Kim Hock Key Moon Nae‐Eung Lee |
| |
| Affiliation: | 1. School of Advanced Materials Science & Engineering, Sungkynkwan University, Suwon, Kyunggi‐do, Korea;2. SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, Kyunggi‐do, Korea;3. Samsung Advanced Institute for Health Sciences & Technology (SAIHST), Sungkyunkwan University, Suwon, Kyunggi‐do, Korea |
| |
| Abstract: | The sensing performance of chemical sensors can be achieved not only by modification or hybridization of sensing materials but also through new design in device geometry. The performance of a chemical sensing device can be enhenced from a simple three‐dimensional (3D) chemiresistor‐based gas sensor platform with an increased surface area by forming networked, self‐assembled reduced graphene oxide (R‐GO) nanosheets on 3D SU8 micro‐pillar arrays. The 3D R‐GO sensor is highly responsive to low concentration of ammonia (NH3) and nitrogen dioxide (NO2) diluted in dry air at room temperature. Compared to the two‐dimensional planar R‐GO sensor structure, as the result of the increase in sensing area and interaction cross‐section of R‐GO on the same device area, the 3D R‐GO gas sensors show improved sensing performance with faster response (about 2%/s exposure), higher sensitivity, and even a possibly lower limit of detection towards NH3 at room temperature. |
| |
| Keywords: | reduced graphene oxide gas sensors SU‐8 micro‐pillar 3D sensors |
|
|
