DC magnetron sputtered Mo-Ti oxide films for color neutral electrochromic devices |
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| Authors: | L Kullman A Azens A Gutarra C G Granqvist |
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| Institution: | (1) Department of Technology, Uppsala University, P. O. Box 534, S-751 21 Uppsala, Sweden |
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| Abstract: | Mo-Ti oxide films with compositions ranging from MoO3 to TiO2 were prepared by reactive DC magnetron sputtering using a newly developed high-rate technique with interacting plasma zones.
Optical and electrochemical measurements showed that an increase of the Ti content yielded increased electrochemical stability,
decreased coloration efficiency, and increased potential for electrochromic coloration. The films have interesting properties
for color-neutral electrochromic devices.
Paper presented at the 2nd Euroconference on Solid State Ionics, Funchal, Madeira, Portugal, Sept. 10–16, 1995 |
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