| 多孔硅-PMMA/DRl复合膜制备方法的研究 |
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| 引用本文： | 贾振红,涂楚辙.多孔硅-PMMA/DRl复合膜制备方法的研究[J].新疆大学学报(理工版),2007,24(2):134-138,143. |
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| 作者姓名： | 贾振红 涂楚辙 |
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| 作者单位： | 新疆大学信息科学与工程学院 新疆乌鲁木齐830046 |
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| 基金项目： | Supported by Program for New Century Excellent Talents in University of the P.R.China(Grant number:NCET-05-0897)，Scientific Research Project for Universities in Xinjiang(Grant number:XJEDU2004E02 and XJEDU2006I10). |
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| 摘 要： | 报道了用电化学腐蚀法结合激光干涉或聚合物掩膜制备多孔硅通道波导、定向耦合器、波导棱镜、光栅耦合器和激光诱导动态光栅等光子器件,并给出了这些多孔硅光波导器件的性能参数,研究结果表明可利用多孔硅开发出新的全硅光电子器件.
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| 关 键 词： | 多孔硅 波导 棱镜 耦合光栅 |
| 文章编号： | 1000-2839（2007）02-0134-05 |
| 修稿时间： | 2007-03-22 |
Fabricating of Porous Silicon Waveguide Devices by Electrochemical Anodisation Method |
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| JIA Zhen-hong,TU Chu-zhe.Fabricating of Porous Silicon Waveguide Devices by Electrochemical Anodisation Method[J].Journal of Xinjiang University(Science & Engineering),2007,24(2):134-138,143. |
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| Authors: | JIA Zhen-hong TU Chu-zhe |
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| Abstract: | Porous silicon buried channel optical waveguides,waveguide directional coupler,waveguides prism,grating coupler and laser-induced dynamic grating fabricated by electrochemical anodisation method assisted by laser beams interference or polymer masking have been reported in this paper.The properties of these optical waveguide devices bave been analyzed.The experimental results show that porous silicon can be used to develop new all-silicon optoelectronic integrated devices. |
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| Keywords: | porous silicon waveguide prism grating coupler |
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