Source of far and vacuum ultraviolet radiation based on a transverse high-frequency discharge

We present the results of an investigation of a short-wavelength radiation source (Δλ = 130–350 nm) with excitation by a transverse high-frequency (f = 1.76 MHz) discharge based on a mixture of argon and chlorine (p = 100–500 Pa). We have studied the spectral characteristics of the plasma, the oscilloscope traces of the voltage, the current and emission of the discharge, the dependence of the power of the emission on the electrical power of the discharge, and also the pressure and partial composition of the Ar/Cl₂ mixture. The UV-VUV source emits in a system of broadened and overlapping ArCl(B/X), Cl₂(D′/A′), and Cl**₂ molecular bands. __________ Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 74, No. 5, pp. 648–651, September–October, 2007.