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Energy Dispersive X-Ray Spectrometry by Microcalorimetry for the SEM |
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| Authors: | Dale Newbury David Wollman Sae Woo Nam Gene Hilton Kent Irwin John Small John Martinis |
| Affiliation: | (1) National Institute of Standards and Technology, Gaithersburg, MD 20899-8371, USA, US |
| Abstract: | |
| Keywords: | : Energy dispersive X-ray spectrometry microanalysis microcalorimeter scanning electron microscopy transition edge sensor. |
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