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Nanoimaging with a compact extreme-ultraviolet laser |
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| Authors: | Vaschenko G Brizuela F Brewer C Grisham M Mancini H Menoni C S Marconi M C Rocca J J Chao W Liddle J A Anderson E H Attwood D T Vinogradov A V Artioukov I A Pershyn Y P Kondratenko V V |
| Affiliation: | National Science Foundation Engineering Research Center for Extreme Ultraviolet Science and Technology, and Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, Colorado 80523, USA. vaschen@engr.colostate.edu |
| Abstract: | Images with a spatial resolution of 120-150 nm were obtained with 46.9 nm light from a compact capillary-discharge laser by use of the combination of a Sc-Si multilayer-coated Schwarzschild condenser and a free-standing imaging zone plate. The results are relevant to the development of compact extreme-ultraviolet laser-based imaging tools for nanoscience and nanotechnology. |
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